Wholesale Carbon Tetrafluoride Manufacturer, Suppliers

About Tetrafluoromethane (CF4)

Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). It has a very high bonding strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane. Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas.

Key Applications

Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

Physical & Chemical Properties

Chemical formula	CF4	Molecular weight	88
CAS No.	75-73-0	EINECS No.	200-896-5
Melting point	-184℃	Boiling point	-128.1℃
solubility	Insoluble in water	Density	1.96g/cm³（-184℃）
Appearance	A colorless, odorless, nonflammable, compressible gas	Application	used in plasma etching process for various integrated circuits, and used also as laser gas, refrigerant etc.
DOT ID Number	UN1982	DOT/IMO SHIPPING NAME	Tetrafluoromethane, Compressed or Refrigerant Gas R14
		DOT Hazard Class	Class 2.2

Specification Grades & Purity Standards

Item	Value, grade I	Value, grade II	Unit
Purity	≥99.999	≥99.9997	%
O₂	≤1.0	≤0.5	ppmv
N₂	≤4.0	≤1.0	ppmv
CO	≤0.1	≤0.1	ppmv
CO₂	≤1.0	≤0.5	ppmv
SF₆	≤0.8	≤0.2	ppmv
Other fluorocarbons	≤1.0	≤0.5	ppmv
H₂O	≤1.0	≤0.5	ppmv
H₂	≤1.0	——	ppmv
Acidity	≤0.1	≤0.1	ppmv
*other fluorocarbons refer to C₂F₆、C₃F₈

Notes:

All the technical data indicated above are for your reference.
Alternative specification is welcome for further discussion.

Frequently Asked Questions

What is Tetrafluoromethane (CF4)?

Tetrafluoromethane, or carbon tetrafluoride (CF4), is the simplest fluorocarbon. Due to its multiple carbon–fluorine bonds and the high electronegativity of fluorine, the carbon atom has a significant positive partial charge that provides additional ionic character, making the chemical bonds exceptionally strong and short.

What are the primary applications of Tetrafluoromethane?

It is primarily used in electronics microfabrication as a plasma etchant for silicon, silicon dioxide, and silicon nitride, either alone or combined with oxygen. It is also used as a low-temperature refrigerant and as a laser gas.

What are the physical properties of Tetrafluoromethane?

Tetrafluoromethane is a colorless, odorless, nonflammable, and compressible gas. It is insoluble in water, has a molecular weight of 88, a melting point of -184℃, a boiling point of -128.1℃, and a density of 1.96g/cm³ at -184℃.

What purity specifications are available for CF4?

Two purity grades are typically offered: Grade I with a purity of ≥99.999% and Grade II with a purity of ≥99.9997%. Impurity levels such as oxygen, nitrogen, carbon monoxide, carbon dioxide, and moisture are strictly controlled within low ppmv ranges.

What are the safety and shipping classifications for CF4?

Tetrafluoromethane is classified under DOT Hazard Class 2.2 as a nonflammable gas. Its DOT ID Number is UN1982, and its official shipping name is Tetrafluoromethane, Compressed or Refrigerant Gas R14.

Can customized product specifications be requested?

Yes, alternative product specifications other than the standard Grade I and Grade II data parameters are welcome for further discussion based on your technical needs.