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| Item | Technical Property | ||
|---|---|---|---|
| High purity xenon GB/T5828-2006 |
Ultrapure xenon | ||
| Xenon (Xe) purity (volume fraction)/10-2≥ | 99.999 | 99.9995 | 99.9999 |
| Nitrogen (N2) content (volume fraction)/10-6≤ | 2.5 | 1.5 | 0.2 |
| Oxygen (O2) content (volume fraction)/10-6≤ | 1.5(O2+Ar) | 0.5(O2+Ar) | 0.1 |
| Argon (Ar) content (volume fraction)/10-6≤ | 0.05 | ||
| Hydrogen (H2) content (volume fraction)/10-6≤ | 0.5 | 0.5 | 0.05 |
| Carbon monoxide (CO) content (volume fraction)/10-6≤ | 0.2 | 0.1 | 0.05(CO+CO2) |
| Carbon dioxide (CO2) content (volume fraction)/10-6≤ | 0.3 | 0.1 | |
| Methane (CH4) content (volume fraction)/10-6≤ | 0.3 | 0.1 | 0.05 |
| Water (H2O) content (volume fraction)/10-6≤ | 2 | 1 | 0.1 |
| Krypton (Kr) content (volume fraction)/10-6≤ | 2 | 1 | 0.1 |
| Nitrous oxide (N2O) content (volume fraction)/10-6≤ | 0.2 | 0.1 | 0.05 |
| Fluoride (C2F6) content (volume fraction)/10-6≤ | 0.5 | 0.1 | 0.05 |
| Fluoride (SF6) content (volume fraction)/10-6≤ | N/A | N/A | 0.05 |