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Tetrafluoromethane, commonly recognized in the chemical industry as Carbon Tetrafluoride (CF4), stands as the simplest perfluorocarbon (PFC). Classified under CAS No. 75-73-0, this colorless, odorless, and non-flammable compressed gas represents an essential processing agent across high-technology sectors. Boasting extraordinary thermal stability and chemical inertness under ambient conditions, Tetrafluoromethane transitions into a highly active source of fluorine radicals when subjected to RF plasma discharge. This unique duality makes it the premier choice for anisotropic dry etching within sub-micron semiconductor fabs.
From an engineering perspective, deploying CF4 requires strict knowledge of its thermodynamic and physical properties. Here is the operational reference overview:
| Property Parameter | Scientific Value | Industrial Relevance / Safety Context |
|---|---|---|
| Molecular Formula | CF4 | Fully fluorinated carbon structure, highly stable bond configuration. |
| Boiling Point | -127.8 °C (145.4 K) | Requires specialized pressurized containment and cryo-handling systems. |
| Melting Point | -183.6 °C (89.6 K) | Remains gas phase under standard transport conditions. |
| Gas Density (at 15 °C) | 3.72 kg/m³ | Heavier than air; presents localized asphyxiation hazard if leaked. |
| Global Warming Potential (GWP) | 6,500 (100-yr horizon) | Highly regulated; demands thermal oxidation or scrubbing systems post-process. |
| Critical Pressure | 3.74 MPa | Standard threshold for high-pressure industrial gas cylinders. |
The semiconductor industry operates at atomic tolerances. Standard industrial-grade Carbon Tetrafluoride contains trace moisture, oxygen, nitrogen, and carbon monoxide, which act as fatal contaminants in modern lithography and plasma processes. Therefore, YANXA provides bespoke purification configurations to match strict fabrication requirements.
To reach 6N (99.9999%) purity, crude Tetrafluoromethane (synthesized via direct fluorination of carbon or through the catalytic fluorination of chlorodifluoromethane) must undergo deep purification. Our synthesis pipeline utilizes low-temperature cryogenic rectification columns combined with advanced molecular sieve adsorbers. This process systematically eliminates volatile atmospheric gases and corrosive hydrofluoric acid residues, delivering a highly consistent product batch after batch.
As geopolitics reshape the map of high-tech manufacturing, sourcing electronic-grade specialty gases has evolved into a strategic challenge. The exponential expansion of wafer fabs across Asia, North America, and Europe has triggered a surge in demand for Carbon Tetrafluoride. Because of the strict quality controls required for semiconductor inputs, reliable, long-term procurement agreements are essential for preventing supply disruptions.
Our industrial-grade and electronic-grade Tetrafluoromethane formulations serve critical roles in several key engineering domains:
Used alongside oxygen (O2) and other fluorocarbons, CF4 is the key gas for etching silicon dioxide, silicon nitride, and polycrystalline silicon. Our 5N5 and 6N purity levels prevent micro-trench defects and residue buildup on the wafer surface.
In solar energy, CF4 plasma helps texture silicon wafers to minimize light reflection, improving solar cell efficiency. This application relies on high-volume, cost-effective industrial-grade CF4.
CF4 serves as a highly stable refrigerant for ultra-low temperature applications (below -100 °C) in scientific research and aerospace systems. Its safety profile makes it a viable alternative to ozone-depleting halons.
Yanxatech System Industries Limited (hereinafter referred to as YANXA) is one of the growing suppliers in the field of specialty materials in China. Starting as a small business unit in 2008, YANXA is driven with the passion of developing a broad international market in the chemical and mechanical industries. Thanks to our team's enduring work and our business partners' long-lasting support, YANXA has steadily grown into a premier supplier of specialty materials, chemicals, and industrial compounds.
Quality, safety, and efficiency prevail over all other values in our business. We address our customers' standard product requirements as well as their specific needs for newly developed applications in a timely manner. We adhere strictly to technical requirements and ensure deliveries align with specifications. Chemical operations involve strict safety considerations; we conduct all chemical handling and logistics under rigorous safety protocols to protect human health and the environment.
In coordination with leading manufacturers and research institutes, YANXA supplies a diverse range of high-performance materials. Below are the technical profiles of our main catalog lines:
High-purity etching gas for semiconductors and cryogenic refrigerants. Our CF4 ensures minimal micro-roughness during critical dielectric etching stages.
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Outstanding dielectric gas for high-voltage electrical insulation and switchgears. Highly stable with excellent arc-quenching capabilities.
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Colorless liquid, easily polymerized, soluble in water, alcohol, and ether. Rapidly oxidizes to formic acid in air. Supplied as formalin (37-50% solution with methanol stabilizer) to prevent polymerization.
Technical Datasheet
White crystalline powder produced by ammonia-formaldehyde condensation. CAS No: 100-97-0. A versatile chemical intermediate used in plastics, rubber processing, and pharmaceuticals.
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White powdery solid with a characteristic formaldehyde odor. A linear polymer with high solubility and purity (≥96% active content) used in synthesis and resin manufacturing.
Material safety data
Highly spherical alloy powder with uniform particle distribution. Engineered for additive manufacturing, aerospace components, and energetic materials.
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High-purity calcium salt of phosphoric acid. Widely used as an anti-caking agent, nutritional supplement, and buffering agent in food processing and pharmaceutical formulations.
Request Full SpecificationsOur pricing structures for Tetrafluoromethane (CF4) and other specialty materials are designed around long-term industrial supply contracts. Factors influencing wholesale pricelists include:
Electronic-grade (5N5 and 6N) gases require deep cryogenic distillation and analytical testing (via GC-DID and ICP-MS), resulting in a premium price compared to industrial-grade (3N) gas used in refrigeration.
We offer packaging options ranging from 47L standard steel cylinders to larger Y-cylinders and ISO tank containers, designed to match the scale of your storage and processing systems.
As a Class 2.2 Non-flammable Gas, CF4 requires specialized shipping and customs clearance. YANXA manages all compliance documentation to ensure safe and efficient global delivery.
Review our technical, logistical, and commercial FAQ guidelines. For customized inquiries, please contact our support team.
Browse additional high-purity gases, liquid rubbers, and metallic powders in our catalog, designed to meet strict performance standards for industrial and high-technology applications.
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