Explore our primary collection of industrial gases, liquid rubbers, and high-purity inorganic materials designed for leading manufacturing sectors globally.
Carbon Tetrafluoride (CF₄), also widely known as tetrafluoromethane, is the simplest fluorocarbon (halocarbon). Characterized by its strong carbon-fluorine bonds, CF₄ is a colorless, non-flammable gas with high thermal stability and chemical inertness under standard operating temperatures. Because of these unique characteristics, it has transitioned from a specialized lab gas into one of the most critical structural components of modern semiconductor etching technology and low-temperature refrigeration systems.
From a molecular perspective, the symmetrical tetrahedral structure of CF₄ offers excellent dielectric properties. In advanced electronic applications, particularly micro-nanolithography, Carbon Tetrafluoride is introduced into dry-etching chambers as a source of reactive fluorine radicals. When subjected to RF (Radio Frequency) plasma, the CF₄ molecule breaks down to generate reactive species that selectively etch silicon dioxide (SiO₂), silicon nitride (Si₃N₄), and polycrystalline silicon.
| Property / Parameter | Standard Value / Details | Significance in Etch Applications |
|---|---|---|
| Chemical Formula | CF₄ (Carbon Tetrafluoride) | Highly stable carbon-fluorine configuration |
| CAS Registry Number | 75-73-0 | Global regulatory identifier |
| Molecular Weight | 88.004 g/mol | Determines gas diffusion rates in plasma chambers |
| Boiling Point | -127.8 °C (145.3 K) | Requires specialized pressurized vaporizing regulators |
| Purity Grades Offered | 99.99% (4N) to 99.9999% (6N) | Ultra-pure grades prevent wafer contamination |
| Critical Temperature | -45.6 °C | Governs packaging dynamics in steel/aluminum cylinders |
For global procurement managers, understanding the geographical and strategic structural layout of the CF₄ supply chain is critical. China has evolved from a bulk chemical processor to the primary refinery for ultra-pure semiconductor-grade electronic specialty gases, providing unique structural advantages:
China holds some of the world's largest fluorite (CaF₂) reserves, which serve as the raw material for hydrofluoric acid (HF). Hydrofluoric acid is the direct chemical precursor for CF₄. Direct vertical integration within Chinese chemical hubs ensures a constant, uninterrupted feed supply, stabilizing pricing against global resource volatility.
Modern Chinese manufacturing facilities utilize sophisticated direct fluorination of elemental carbon or catalyzed halogen exchange of carbon tetrachloride (CCl₄) with HF. These methods are executed inside state-of-the-art, anti-corrosive reactors to prevent carbon monoxide (CO) and nitrogen impurities from entering the process stream.
Scale economy, integrated production parks, and highly optimized local logistics allow Chinese factories to offer highly competitive quotes for bulk containers, Y-cylinders, and ISO tanks. This makes the procurement of CF₄ from China a highly cost-efficient solution for fab operators looking to optimize their OPEX.
As semiconductor lithography nodes advance below 7nm toward 3nm and 2nm, the demands placed on electronic etching gases have risen exponentially. The global silicon industry requires high-purity CF₄ with extremely tight tolerances for trace contaminants such as carbon dioxide (CO₂), moisture (H₂O), oxygen (O₂), nitrogen (N₂), and other fluorinated hydrocarbons.
Because Carbon Tetrafluoride is classified under UN 1982 as a non-flammable, non-toxic compressed gas (Class 2.2), shipping and local delivery demand strict adherence to domestic safety regulations in North America, the EU, East Asia, and Southeast Asia. Working with YANXA ensures complete compliance across the following parameters:
We supply CF₄ in a variety of container configurations: seamless steel cylinders (40L, 47L, 50L), high-volume Y-cylinders (440L, 470L), and high-capacity ISO tanks. Each cylinder undergoes thorough ultrasonic testing, moisture evacuation, and custom valve fitting (e.g., DISS 716 or CGA 580 valves) to match local fab distribution systems.
CF₄ has a high Global Warming Potential (GWP of 7390) and an atmospheric lifetime of 50,000 years. Fabs are required to install point-of-use (POU) abatement systems. We support fabs in calculating environmental balances by providing accurate concentration parameters and recovery system advice.
Every shipment is accompanied by a detailed Certificate of Analysis (COA) generated by advanced Gas Chromatography-Mass Spectrometry (GC-MS) and FTIR detection systems. Safety Data Sheets (SDS) are available in multiple languages according to local GHS standards.
High-purity Carbon Tetrafluoride serves multiple specialized engineering roles beyond basic silicon etching:
In memory (3D NAND, DRAM) and logic chip fabrication, CF₄ plasma is used to perform highly anisotropic etching of thin films. Mixing CF₄ with Oxygen (O₂) or Hydrogen (H₂) optimizes selectivity and wall angle profiles.
Over time, Chemical Vapor Deposition (CVD) tools accumulate deposits on the interior walls. CF₄ mixtures generate active fluorine species in plasma, reacting with silica residues to form volatile SiF₄, which is easily pumped away.
In photovoltaic manufacturing, CF₄ is utilized to etch the anti-reflective silicon nitride coating on crystalline solar panels, helping to maximize sunlight trapping and convert energy more efficiently.
Yanxatech System Industries Limited (hereinafter referred to as YANXA) is one of the growing suppliers in the field of specialty materials in China. Starting as a small business unit in 2008, YANXA is driven with the passion of developing a broad international market in the area relating to the chemical and mechanical industries.
Thanks to our team’s enduring and persistent work and our business partners’ long-lasting support, YANXA has steadily and vigorously grown into a company with excellence in delivering products and services relating to specialty chemicals. Cooperating with leading manufacturers and the renowned research institutes in the field of specialty chemicals in China, YANXA is capable of supplying: 1) liquid rubber; 2) nitrate; 3) metal powder & metal alloyed powders.
Quality, safety, and efficiency prevail over all values in our business. We care what our customers’ need on general products as well as their unique and specific requirements for newly developed applications in a timely manner. We adhere strictly to technical requirements and make deliveries in almost perfect conformity.
Chemical business processes expose more safety concerns than any other industrial sectors. We undertake all activities involving chemicals in a safe way to ensure the safety of human health and the environment. Our factory has grown into a premier ISO9001:2008 Certified manufacturer of high-quality, cost-effective products.
Explore the specific physical-chemical characteristics of our high-demand specialty materials lines, manufactured under strict quality controls.
A high-purity, halogenated gas crucial for semiconductor plasma etching and CVD chamber cleaning. Packaged securely to prevent leaks and moisture contamination.
A colorless liquid, easily polymerized, and readily soluble in water, alcohol, and ether. Rapidly oxidized to formic acid in air. Commercially supplied as a 37-50% solution with methanol added as an inhibitor.
Also known as HMTA, this white crystalline powder (CAS 100-97-0) is produced via the condensation reaction of formaldehyde and ammonia. Widely used as a curing agent in resins, plastics, and rubber.
A linear polymer of formaldehyde with a flammable odor of formaldehyde. Offered in 92% and 96% purity solid options. Highly soluble in water, leaving minimal ash residue.
Spherical alloy powder synthesized through advanced inert gas atomization. Provides excellent flowability, oxidation resistance, and uniform grain sizing for metallurgy and coatings.
Used extensively as a flow promoter, anti-caking agent, and mineral source in industrial applications. Demonstrates high chemical stability and consistent physical particle sizing.
A synthetic, inorganic gas famous for its outstanding electrical insulation and dielectric properties. Extensively utilized in high-voltage power transmission switchgears.
Detailed, authoritative answers to common commercial and technical queries regarding specialty chemicals sourcing, logistics, and cylinder systems.
Browse our additional range of specialized liquid synthetic rubbers, atomized alloy powders, and rare electronic materials.
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